Fabrication of titanium oxide field emitter array on glass substrate

Fabrication of titanium oxide field emitter array on glass substrate

A two-dimensional array of a Ti disk on an Au thin film on a glass substrate was fabricated. Patterning of titanium-oxide thin film seems to be effective to release stress and contribute to realization of uniform nanorods over large area.

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Bibliographische Detailangaben
Hauptverfasser: Nakatani, Takuo, Abo, Satoshi, Wakaya, Fujio, Takai, Mikio
Format: Tagungsbericht
Sprache:eng
Schlagworte:
field emitter array
stress release
titanim oxide
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Beschreibung
Zusammenfassung:A two-dimensional array of a Ti disk on an Au thin film on a glass substrate was fabricated. Patterning of titanium-oxide thin film seems to be effective to release stress and contribute to realization of uniform nanorods over large area.
ISSN:2164-2370
DOI:10.1109/IVNC.2013.6624723