Micromachined acoustic Fabry-Perot system for distance measurement

Micromachined acoustic Fabry-Perot system for distance measurement

We report on a packaged miniaturized ultrasound based distance measurement system. The measurement principle is based on acoustic resonances between object and sensor, similar to the Fabry-Perot principle known in optics. The sensor system consists of two micromachined membrane resonators acting as...

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Bibliographische Detailangaben
Hauptverfasser: Hornung, M., Brand, O., Paul, O., Baltes, H., Kuratli, C., Huang, Q.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acoustic measurements
Acoustic sensors
Distance measurement
Fabry-Perot
Optical receivers
Optical resonators
Optical sensors
Optical transmitters
Ultrasonic imaging
Ultrasonic variables measurement
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Beschreibung
Zusammenfassung:We report on a packaged miniaturized ultrasound based distance measurement system. The measurement principle is based on acoustic resonances between object and sensor, similar to the Fabry-Perot principle known in optics. The sensor system consists of two micromachined membrane resonators acting as ultrasound transmitter and receiver. The proximity sensor can measure distances in air in the range of 1 to 10 cm with an accuracy better than 0.8 mm.
ISSN:1084-6999
DOI:10.1109/MEMSYS.1998.659833