Thermal flow sensor for liquids and gases

Thermal flow sensor for liquids and gases

A new type of a flow sensor is presented which is based on a thermal principle. The combination of two detecting methods results both in a considerable increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction time of less than 2 ms. Furthermore, the sensor is furthermore relatively in...

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Bibliographische Detailangaben
Hauptverfasser: Ashauer, M., Glosch, H., Hedrich, F., Hey, N., Sandmaier, H., Lang, W.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Biomembranes
Fluid flow
Fluid flow measurement
Gases
Heat transfer
Isolation technology
Manufacturing
Pollution measurement
Silicon
Thermal sensors
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Beschreibung
Zusammenfassung:A new type of a flow sensor is presented which is based on a thermal principle. The combination of two detecting methods results both in a considerable increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction time of less than 2 ms. Furthermore, the sensor is furthermore relatively insensitive to pollution. Devices were manufactured and successfully tested for liquids and gases.
ISSN:1084-6999
DOI:10.1109/MEMSYS.1998.659781