The Design and Analysis of Monolithic Integration of CMOS-Compatible Plasmonic Waveguides for On-Chip Electronic-Photonic Integrated Circuits
Plasmonic waveguides based on surface plasmon polaritons (SPPs) are highly complementary metal-oxide-semiconductor (CMOS)-compatible that they have been considered as a prospective basic element to implement future on-chip subwavelength electronic-photonic integrated circuits (EPICs). We propose the...
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Veröffentlicht in: | Journal of lightwave technology 2013-09, Vol.31 (18), p.2974-2981 |
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description | Plasmonic waveguides based on surface plasmon polaritons (SPPs) are highly complementary metal-oxide-semiconductor (CMOS)-compatible that they have been considered as a prospective basic element to implement future on-chip subwavelength electronic-photonic integrated circuits (EPICs). We propose the monolithic integration of CMOS-compatible plasmonic waveguides within CMOS architecture for the development of CMOS EPICs. Based on a preformed CMOS optoelectronic platform, several different types of plasmonic EPIC schematics are proposed. The vertical directional coupling characteristics of the proposed plasmonic EPICs are thoroughly investigated in detail at a telecom wavelength of 1.55 μm. By changing the geometrical parameters of the plasmonic waveguides, we identified the coupler configuration that provides optimal optical performance. We discussed the design and fabrication issues for further development of the proposed plasmonic CMOS EPICs and related microsystems. We concluded that the proposed monolithic integration platform would make first step forward to exploiting for plasmonic-based 3-D on-chip EPICs. |
doi_str_mv | 10.1109/JLT.2013.2276761 |
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We propose the monolithic integration of CMOS-compatible plasmonic waveguides within CMOS architecture for the development of CMOS EPICs. Based on a preformed CMOS optoelectronic platform, several different types of plasmonic EPIC schematics are proposed. The vertical directional coupling characteristics of the proposed plasmonic EPICs are thoroughly investigated in detail at a telecom wavelength of 1.55 μm. By changing the geometrical parameters of the plasmonic waveguides, we identified the coupler configuration that provides optimal optical performance. We discussed the design and fabrication issues for further development of the proposed plasmonic CMOS EPICs and related microsystems. We concluded that the proposed monolithic integration platform would make first step forward to exploiting for plasmonic-based 3-D on-chip EPICs.</description><identifier>ISSN: 0733-8724</identifier><identifier>EISSN: 1558-2213</identifier><identifier>DOI: 10.1109/JLT.2013.2276761</identifier><identifier>CODEN: JLTEDG</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Circuit properties ; CMOS integrated circuits ; Couplers ; Couplings ; Electric, optical and optoelectronic circuits ; Electronics ; Exact sciences and technology ; Integrated optics ; Integrated optics. Optical fibers and wave guides ; Integrated optoelectronics. Optoelectronic circuits ; Miscellaneous ; MOS integrated circuit ; nanophotonics ; Optical and optoelectronic circuits ; Optical waveguides ; Optoelectronic devices ; photonic integrated circuit ; Plasmons ; Propagation losses ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Silicon ; subwavelength optical interconnections ; surface plasmons</subject><ispartof>Journal of lightwave technology, 2013-09, Vol.31 (18), p.2974-2981</ispartof><rights>2014 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c359t-1a03a17be6177f6cf899a91df32f03ab2a4fef599d5d25f4270e89b96a752e203</citedby><cites>FETCH-LOGICAL-c359t-1a03a17be6177f6cf899a91df32f03ab2a4fef599d5d25f4270e89b96a752e203</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6578137$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27903,27904,54736</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6578137$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=27834048$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Kim, Jin Tae</creatorcontrib><creatorcontrib>Park, Suntak</creatorcontrib><title>The Design and Analysis of Monolithic Integration of CMOS-Compatible Plasmonic Waveguides for On-Chip Electronic-Photonic Integrated Circuits</title><title>Journal of lightwave technology</title><addtitle>JLT</addtitle><description>Plasmonic waveguides based on surface plasmon polaritons (SPPs) are highly complementary metal-oxide-semiconductor (CMOS)-compatible that they have been considered as a prospective basic element to implement future on-chip subwavelength electronic-photonic integrated circuits (EPICs). We propose the monolithic integration of CMOS-compatible plasmonic waveguides within CMOS architecture for the development of CMOS EPICs. Based on a preformed CMOS optoelectronic platform, several different types of plasmonic EPIC schematics are proposed. The vertical directional coupling characteristics of the proposed plasmonic EPICs are thoroughly investigated in detail at a telecom wavelength of 1.55 μm. By changing the geometrical parameters of the plasmonic waveguides, we identified the coupler configuration that provides optimal optical performance. We discussed the design and fabrication issues for further development of the proposed plasmonic CMOS EPICs and related microsystems. We concluded that the proposed monolithic integration platform would make first step forward to exploiting for plasmonic-based 3-D on-chip EPICs.</description><subject>Applied sciences</subject><subject>Circuit properties</subject><subject>CMOS integrated circuits</subject><subject>Couplers</subject><subject>Couplings</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Integrated optics</subject><subject>Integrated optics. Optical fibers and wave guides</subject><subject>Integrated optoelectronics. Optoelectronic circuits</subject><subject>Miscellaneous</subject><subject>MOS integrated circuit</subject><subject>nanophotonics</subject><subject>Optical and optoelectronic circuits</subject><subject>Optical waveguides</subject><subject>Optoelectronic devices</subject><subject>photonic integrated circuit</subject><subject>Plasmons</subject><subject>Propagation losses</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Silicon</subject><subject>subwavelength optical interconnections</subject><subject>surface plasmons</subject><issn>0733-8724</issn><issn>1558-2213</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kD1PwzAURS0EEqWwI7F4YUzxRxLHYxUKFLVqJYoYIyd5bo1Su7JTpP4I_jMJhU5PevfcOxyEbikZUUrkw-tsNWKE8hFjIhUpPUMDmiRZxBjl52hABOdRJlh8ia5C-CSExnEmBuh7tQH8CMGsLVa2xmOrmkMwATuN5866xrQbU-GpbWHtVWuc7ZN8vniLcrfddZ-yAbxsVNg624Ef6gvWe1NDwNp5vLBRvjE7PGmgan1PRMuNa3_R_02ocW58tTdtuEYXWjUBbv7uEL0_TVb5SzRbPE_z8SyqeCLbiCrCFRUlpFQInVY6k1JJWmvOdJeUTMUadCJlndQs0TETBDJZylSJhAEjfIjIcbfyLgQPuth5s1X-UFBS9DqLTmfR6yz-dHaV-2Nlp0KlGu2VrUw49ZjIeEzirOPujpwBgFOcJiKjXPAf81CABg</recordid><startdate>20130915</startdate><enddate>20130915</enddate><creator>Kim, Jin Tae</creator><creator>Park, Suntak</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20130915</creationdate><title>The Design and Analysis of Monolithic Integration of CMOS-Compatible Plasmonic Waveguides for On-Chip Electronic-Photonic Integrated Circuits</title><author>Kim, Jin Tae ; Park, Suntak</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c359t-1a03a17be6177f6cf899a91df32f03ab2a4fef599d5d25f4270e89b96a752e203</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Applied sciences</topic><topic>Circuit properties</topic><topic>CMOS integrated circuits</topic><topic>Couplers</topic><topic>Couplings</topic><topic>Electric, optical and optoelectronic circuits</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Integrated optics</topic><topic>Integrated optics. Optical fibers and wave guides</topic><topic>Integrated optoelectronics. Optoelectronic circuits</topic><topic>Miscellaneous</topic><topic>MOS integrated circuit</topic><topic>nanophotonics</topic><topic>Optical and optoelectronic circuits</topic><topic>Optical waveguides</topic><topic>Optoelectronic devices</topic><topic>photonic integrated circuit</topic><topic>Plasmons</topic><topic>Propagation losses</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Silicon</topic><topic>subwavelength optical interconnections</topic><topic>surface plasmons</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kim, Jin Tae</creatorcontrib><creatorcontrib>Park, Suntak</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><jtitle>Journal of lightwave technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kim, Jin Tae</au><au>Park, Suntak</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>The Design and Analysis of Monolithic Integration of CMOS-Compatible Plasmonic Waveguides for On-Chip Electronic-Photonic Integrated Circuits</atitle><jtitle>Journal of lightwave technology</jtitle><stitle>JLT</stitle><date>2013-09-15</date><risdate>2013</risdate><volume>31</volume><issue>18</issue><spage>2974</spage><epage>2981</epage><pages>2974-2981</pages><issn>0733-8724</issn><eissn>1558-2213</eissn><coden>JLTEDG</coden><abstract>Plasmonic waveguides based on surface plasmon polaritons (SPPs) are highly complementary metal-oxide-semiconductor (CMOS)-compatible that they have been considered as a prospective basic element to implement future on-chip subwavelength electronic-photonic integrated circuits (EPICs). We propose the monolithic integration of CMOS-compatible plasmonic waveguides within CMOS architecture for the development of CMOS EPICs. Based on a preformed CMOS optoelectronic platform, several different types of plasmonic EPIC schematics are proposed. The vertical directional coupling characteristics of the proposed plasmonic EPICs are thoroughly investigated in detail at a telecom wavelength of 1.55 μm. By changing the geometrical parameters of the plasmonic waveguides, we identified the coupler configuration that provides optimal optical performance. We discussed the design and fabrication issues for further development of the proposed plasmonic CMOS EPICs and related microsystems. We concluded that the proposed monolithic integration platform would make first step forward to exploiting for plasmonic-based 3-D on-chip EPICs.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JLT.2013.2276761</doi><tpages>8</tpages></addata></record> |
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subjects | Applied sciences Circuit properties CMOS integrated circuits Couplers Couplings Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Integrated optics Integrated optics. Optical fibers and wave guides Integrated optoelectronics. Optoelectronic circuits Miscellaneous MOS integrated circuit nanophotonics Optical and optoelectronic circuits Optical waveguides Optoelectronic devices photonic integrated circuit Plasmons Propagation losses Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silicon subwavelength optical interconnections surface plasmons |
title | The Design and Analysis of Monolithic Integration of CMOS-Compatible Plasmonic Waveguides for On-Chip Electronic-Photonic Integrated Circuits |
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