Bit Cost Scalable (BiCS) technology for future ultra high density storage memories

Bit Cost Scalable (BiCS) technology for future ultra high density storage memories

We proposed Bit Cost Scalable (BiCS) technology in 2007 as a three-dimensional memory for the future ultra high density storage devices, which extremely reduce the bit costs by vertically stacking memory arrays with punch and plug process. We've applied it to just NAND flash, which is BiCS Flas...

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Bibliographische Detailangaben
Hauptverfasser: Nitayama, Akihiro, Aochi, Hideaki
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Arrays
Electrodes
Flash memories
Lithography
Logic gates
SONOS devices
Very large scale integration
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Beschreibung
Zusammenfassung:We proposed Bit Cost Scalable (BiCS) technology in 2007 as a three-dimensional memory for the future ultra high density storage devices, which extremely reduce the bit costs by vertically stacking memory arrays with punch and plug process. We've applied it to just NAND flash, which is BiCS Flash memory, and established the mass production technology. Moreover, we can apply the BiCS technology to various memories. The critical scaling issues and the comparison among various 3D-Flash-type memories are to be discussed, as well.
ISSN:0743-1562