Time of flight image sensor with 7um pixel and 640×480 resolution

Time of flight (ToF) sensor with pixel size of 7×7um and VGA resolution is developed using a backside illumination (BSI) structure. Quantum efficiency (QE) of near infrared (NIR) light is improved dramatically by applying thick epitaxial layer, reflection metal and anti-reflection layer. The depth e...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Seounghyun Kim, Seungwon Cha, Heewoo Park, Jooyeong Gong, Yohwan Noh, Wanghyun Kim, Seunghoon Lee, Dong-Ki Min, Wonjoo Kim, Tae-Chan Kim, Eunseung Jung
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Adaptive optics Image sensors Light emitting diodes Metals Optical sensors Reflection Silicon
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