Time of flight image sensor with 7um pixel and 640×480 resolution

Time of flight image sensor with 7um pixel and 640×480 resolution

Time of flight (ToF) sensor with pixel size of 7×7um and VGA resolution is developed using a backside illumination (BSI) structure. Quantum efficiency (QE) of near infrared (NIR) light is improved dramatically by applying thick epitaxial layer, reflection metal and anti-reflection layer. The depth e...

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Bibliographische Detailangaben
Hauptverfasser: Seounghyun Kim, Seungwon Cha, Heewoo Park, Jooyeong Gong, Yohwan Noh, Wanghyun Kim, Seunghoon Lee, Dong-Ki Min, Wonjoo Kim, Tae-Chan Kim, Eunseung Jung
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Adaptive optics
Image sensors
Light emitting diodes
Metals
Optical sensors
Reflection
Silicon
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Beschreibung
Zusammenfassung:Time of flight (ToF) sensor with pixel size of 7×7um and VGA resolution is developed using a backside illumination (BSI) structure. Quantum efficiency (QE) of near infrared (NIR) light is improved dramatically by applying thick epitaxial layer, reflection metal and anti-reflection layer. The depth error ranges are 2cm and 10cm at 90% and 10% reflection condition at the distance of 7m, respectively.
ISSN:0743-1562