Numerical simulation of an electromagnetic bending-mode cantilever microactuator

Micro electromechanical systems (MEMS) are complex devices that consist of structural parts, magnetic materials, and electric coils that interact. Their fabrication relies on complex and expensive technologies therefore accurate design solutions that utilize mathematical modeling and numerical simul...

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Bibliographische Detailangaben

Hauptverfasser:	Morega, A. M., Tanase, N., Popa, M., Morega, M., Dumitru, J. B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Blades cantilever finite element Magnetic domains Magnetic fields magnetic microactuator Mathematical model mathematical modeling Mirrors modal analysis Numerical models numerical simulation planar spiral coil Solid modeling stationary analysis
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