Numerical simulation of an electromagnetic bending-mode cantilever microactuator

Micro electromechanical systems (MEMS) are complex devices that consist of structural parts, magnetic materials, and electric coils that interact. Their fabrication relies on complex and expensive technologies therefore accurate design solutions that utilize mathematical modeling and numerical simulations. This paper presents a MEMS bending-mode cantilever microactuator (BCM). Two design solution are CAD-virtualized and their behavior in stationary conditions is evaluated by numerical simulations. The eigenfrequency analysis reveals the modal structural behavior of the BCM. These results may be of interest in the design stage of prototyping such devices.