Polycrystalline PZT film on porous Ti substrate synthesized by Ultrasonic Assisted Hydrothermal Method

Polycrystalline PZT film on porous Ti substrate synthesized by Ultrasonic Assisted Hydrothermal Method

The hydrothermal method utilizes a solution-based chemical reaction to synthesize piezoelectric films. We proposed an ultrasonic irradiation during the hydrothermal synthesis, named an Ultrasonic Assisted Hydrothermal Method (UAHTM). In this study, two topics are reported, the optimum ultrasonic irr...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Ohtal, Kanako, Isobel, Gaku, Bornmann, Peter, Hemsel, Tobias, Morita, Takeshi
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acoustics
Actuators
Piezoelectric polarization
Substrates
Transducers
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The hydrothermal method utilizes a solution-based chemical reaction to synthesize piezoelectric films. We proposed an ultrasonic irradiation during the hydrothermal synthesis, named an Ultrasonic Assisted Hydrothermal Method (UAHTM). In this study, two topics are reported, the optimum ultrasonic irradiation period for getting thicker PZT film and the PZT deposition on porous Ti substrate by UAHTM.
ISSN:1051-0117
DOI:10.1109/ULTSYM.2012.0046