Design and Fabrication of Integrated Magnetic MEMS Energy Harvester for Low Frequency Applications

An integrated vibration-to-electrical MEMS electromagnetic energy harvester with low resonant frequency is designed, simulated, fabricated and tested. Special structures and magnet arrays of the device are designed and simulated for favorable low frequency performance. Both FEM simulations and system-level simulations are conducted to investigate the induced voltage of the device. Two types of harvester are fabricated with different magnet arrays and the magnetic field of the two harvesters is investigated. With the combination of the microfabricated metal structures and the electroplated CoNiMnP permanent micro magnets, the designed harvesters are of small size (5 mm ×5 mm × 0.53 mm) without manual assembly of conventional bulk magnets. The output power density is 0.03 μW/cm 3 with optimized resistance load at 64 Hz. This magnetic harvester is suitable for batch fabrication through MEMS process and can be utilized to drive microelectronic devices, such as micro implantable and portable devices.