Low profile integrated passive devices with 3D high density capacitors ideal for embedded and die stacking solutions

* The low profile IPDIA technology capability is limited by the density of the trench capacitor, more explicitly by the depth of the trench. * The 80μm Low Profile node dedicated to the highest capacitor density is qualified. * IPDIA is providing the lowest profile 3D Silicon capacitors with a super...

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Bibliographische Detailangaben
Hauptverfasser: Bunel, Catherine, Pommier, Mickael, Jacqueline, Sebastien
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:* The low profile IPDIA technology capability is limited by the density of the trench capacitor, more explicitly by the depth of the trench. * The 80μm Low Profile node dedicated to the highest capacitor density is qualified. * IPDIA is providing the lowest profile 3D Silicon capacitors with a superior stability and reliability over a wide temperature range. * Ideal solution where volume and weight are major concerns.
DOI:10.1109/ESTC.2012.6542168