Deposition of homo-multilayer indium tin oxide films on PET substrates by roll-to-roll sputtering

In this letter, the homo-multilayer indium tin oxide (ITO) film is deposited by the continuous roll-to-roll sputtering at room temperature. While piling up to homo-5-layer ITO film, the best transmittance of 87.66% in visible wavelength and the sheet resistance of 68Ω/□ are obtained. The TEM diffrac...

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Bibliographische Detailangaben

Hauptverfasser:	Hung-Wei Yeh, Chih-Lung Tseng, Po-Jui Chiang, Jau-Ji Jou, Nai-Hsiang Sun
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Indium tin oxide Optical films Positron emission tomography Resistance Sputtering Substrates
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