Deposition of homo-multilayer indium tin oxide films on PET substrates by roll-to-roll sputtering

In this letter, the homo-multilayer indium tin oxide (ITO) film is deposited by the continuous roll-to-roll sputtering at room temperature. While piling up to homo-5-layer ITO film, the best transmittance of 87.66% in visible wavelength and the sheet resistance of 68Ω/□ are obtained. The TEM diffraction images of ITO films show crystalline at the optimal 5-layer structure, and the nano-sized grains (~50 nm) distributed uniformly all over the surface from SEM and TEM investigation.