Design and simulation of a novel microgripper with capability to vibrate end-effectors for releasing nano particles

This paper investigates the design and simulation of a novel microgripper which is able to release nano particles by vibration. After picking and transferring the object to the desirable substrate electrothermally, an electrostatic oscillation system (interdigited comb-drive system) generates vibrat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Demaghsi, H., Ghavifekr, H. B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Active Release Technique Damping Heating Micro Electro Mechanical Systems (MEMS) Nanohandling Nanotubes Robustness Silicon Substrates Vibrating Microgripper Wires
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