Design and simulation of a novel microgripper with capability to vibrate end-effectors for releasing nano particles
This paper investigates the design and simulation of a novel microgripper which is able to release nano particles by vibration. After picking and transferring the object to the desirable substrate electrothermally, an electrostatic oscillation system (interdigited comb-drive system) generates vibrat...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | This paper investigates the design and simulation of a novel microgripper which is able to release nano particles by vibration. After picking and transferring the object to the desirable substrate electrothermally, an electrostatic oscillation system (interdigited comb-drive system) generates vibration at the gripper arms that facilitates the release process by taking advantage of inertial effects. |
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DOI: | 10.1109/ICRoM.2013.6510114 |