Simulation of a nobel porous Si based cantilever beam CA 15-3 protein sensor

In this paper a cantilever beam Bio-sensor based on porous Si has been simulated. Adding the mass of a CA 15-3 protein to the mass of the cantilever beam can make a frequency shift, which is used for the measurement. Here a sensitivity of S = 4.896×10 7 Hz/μg for detection CA 15-3 protein with mass of m = 4.982×10 -10 ng has been achieved. Having the surface of the sensor porous let us make sensors with such sensitivities. Porous cantilever beam caused the sensitivity and the bandwidth of the biosensor increase, and saturation takes place at higher number of CA 15-3 proteins absorbed. Besides porous sensor showed lower threshold.