TFA image sensors: from the one transistor cell to a locally adaptive high dynamic range sensor

TFA image sensors: from the one transistor cell to a locally adaptive high dynamic range sensor

TFA (Thin Film on ASIC) image sensors consist of an amorphous silicon (a-Si:H) based optical detector on top of an ASIC which performs signal readout or signal processing for each individual pixel. In this paper we present recent prototypes of image sensors in TFA technology. The ASICs have been fab...

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Hauptverfasser: Schneider, B., Fischer, H., Benthien, S., Keller, H., Lule, T., Rieve, P., Sommer, M., Schulte, J., Bohm, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Amorphous silicon
Application specific integrated circuits
Image sensors
Optical detectors
Optical films
Optical signal processing
Pixel
Semiconductor thin films
Signal processing
Thin film sensors
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Beschreibung
Zusammenfassung:TFA (Thin Film on ASIC) image sensors consist of an amorphous silicon (a-Si:H) based optical detector on top of an ASIC which performs signal readout or signal processing for each individual pixel. In this paper we present recent prototypes of image sensors in TFA technology. The ASICs have been fabricated in a standard 0.7 /spl mu/m CMOS process, the detector multilayer was deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD).
ISSN:0163-1918
2156-017X
DOI:10.1109/IEDM.1997.650341