Scaling directions for 2D and 3D NAND cells

This paper describes NAND cell scaling directions for 20nm and beyond. Many of the 2D NAND cell scaling challenges can be resolved by a planar floating gate (FG) cell. Scaling directions and key technology requirements for 3D NAND are also discussed.

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Bibliographische Detailangaben
Hauptverfasser: Goda, A., Parat, K.
Format: Tagungsbericht
Sprache:eng
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