Epitaxially-encapsulated polysilicon disk resonator gyroscope
We present a 0.6 mm diameter, 20 μm thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed-loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.286 mV/(°/s) and Angle Random Walk (ARW) of...
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| creator | Nitzan, S. Ahn, C. H. Su, T.-H Li, M. Ng, E. J. Wang, S. Yang, Z. M. O'Brien, G. Boser, B. E. Kenny, T. W. Horsley, D. A. |
| description | We present a 0.6 mm diameter, 20 μm thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed-loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.286 mV/(°/s) and Angle Random Walk (ARW) of 0.006 (°/s)/√Hz. Without precise control of temperature, the minimum Allan deviation is 3.29 °/hr. |
| doi_str_mv | 10.1109/MEMSYS.2013.6474319 |
| format | Conference Proceeding |
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A.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Nitzan, S.</au><au>Ahn, C. H.</au><au>Su, T.-H</au><au>Li, M.</au><au>Ng, E. J.</au><au>Wang, S.</au><au>Yang, Z. M.</au><au>O'Brien, G.</au><au>Boser, B. E.</au><au>Kenny, T. W.</au><au>Horsley, D. A.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Epitaxially-encapsulated polysilicon disk resonator gyroscope</atitle><btitle>2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)</btitle><stitle>MEMSYS</stitle><date>2013-01</date><risdate>2013</risdate><spage>625</spage><epage>628</epage><pages>625-628</pages><issn>1084-6999</issn><isbn>9781467356541</isbn><isbn>1467356549</isbn><eisbn>1467356557</eisbn><eisbn>9781467356558</eisbn><abstract>We present a 0.6 mm diameter, 20 μm thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed-loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.286 mV/(°/s) and Angle Random Walk (ARW) of 0.006 (°/s)/√Hz. Without precise control of temperature, the minimum Allan deviation is 3.29 °/hr.</abstract><pub>IEEE</pub><doi>10.1109/MEMSYS.2013.6474319</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 1084-6999 |
| ispartof | 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), 2013, p.625-628 |
| issn | 1084-6999 |
| language | eng |
| recordid | cdi_ieee_primary_6474319 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Conferences Deviation Disks Electrodes Electrostatics Epitaxy Frequency response Gyroscopes Mechanical systems Noise Oscillators Resonant frequency Resonators Temperature measurement |
| title | Epitaxially-encapsulated polysilicon disk resonator gyroscope |
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