Epitaxially-encapsulated polysilicon disk resonator gyroscope

Epitaxially-encapsulated polysilicon disk resonator gyroscope

We present a 0.6 mm diameter, 20 μm thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed-loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.286 mV/(°/s) and Angle Random Walk (ARW) of...

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Hauptverfasser: Nitzan, S., Ahn, C. H., Su, T.-H, Li, M., Ng, E. J., Wang, S., Yang, Z. M., O'Brien, G., Boser, B. E., Kenny, T. W., Horsley, D. A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Conferences
Deviation
Disks
Electrodes
Electrostatics
Epitaxy
Frequency response
Gyroscopes
Mechanical systems
Noise
Oscillators
Resonant frequency
Resonators
Temperature measurement
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Beschreibung
Zusammenfassung:We present a 0.6 mm diameter, 20 μm thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed-loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.286 mV/(°/s) and Angle Random Walk (ARW) of 0.006 (°/s)/√Hz. Without precise control of temperature, the minimum Allan deviation is 3.29 °/hr.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2013.6474319