Control of chemical composition of rare-earth substituted iron garnets using biased target deposition

Rare earth cerium substituted europium iron garnets (CeEu) 3 (FeGa) 5 O 12 (Ce:EIG) as well as the elemental oxides were deposited on fused quartz substrates using Biased Target Deposition (BTD). The Ce:EIG films are prepared at low temperature (80-120°C) by sputtering four metallic targets simultaneously using a low energy ion beam. This method provides control over the material composition in a predictable way by controlling the bias duty cycle on individual targets.