Love wave devices with excellent temperature stability for application in gas sensor

Love wave devices with excellent temperature stability for application in gas sensor

The temperature property of Love wave device for application in gas sensor was analyzed theoretically by solving the coupled electromechanical field equation, and the optimal design parameters were extraction, leading to excellent temperature stability. Low temperature coefficient of the fabricated...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Wang Wen, Xie Xiao, Hou Jiaoli, He Shitang
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Electric potential
Gas detectors
Substrates
Temperature
Temperature measurement
Temperature sensors
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Beschreibung
Zusammenfassung:The temperature property of Love wave device for application in gas sensor was analyzed theoretically by solving the coupled electromechanical field equation, and the optimal design parameters were extraction, leading to excellent temperature stability. Low temperature coefficient of the fabricated Love wave delay lines with guide layer of SU-8 on ST-90°X quartz substrate is achieved experimentally as only -4.4 ppm/°C, which agrees well with the calculated results.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2012.6411032