The control system of industrial plant for large reflectors ion-plasma coating

The control system of industrial plant for large reflectors ion-plasma coating

The control system of industrial plant for ion-plasma treatment of large reflectors is presented in the report. Brief description of the structure and technological capabilities of the plant is given. The selection of structure of the control system and master controller is justified. The principles...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Paschenko, O., Soloviev, A., Yudakov, S.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Coatings
Control system
controller XPAC
Heating
Ion sources
Magnetrons
reflector
Vacuum systems
Valves
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Beschreibung
Zusammenfassung:The control system of industrial plant for ion-plasma treatment of large reflectors is presented in the report. Brief description of the structure and technological capabilities of the plant is given. The selection of structure of the control system and master controller is justified. The principles of the controller executive program are described. Design features of the control system are given.
DOI:10.1109/IFOST.2012.6357781