A vertically integrated media-isolated absolute pressure sensor

A vertically integrated media-isolated absolute pressure sensor

A novel, media-isolated, temperature-compensated, bulk-micromachined integrated absolute pressure sensor has successfully been developed. The sensor is usable for most applications involving exposure to harsh media, such as fuel vapor seen by manifold absolute pressure (MAP) sensors. Characterizatio...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Goldman, K., Gritt, G., Baskett, I., Sooriakumar, K., Wallace, D., Hughes, D., Shah, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Costs
Etching
Glass
Packaging
Piezoresistance
Sensor phenomena and characterization
Temperature sensors
Transducers
Wafer bonding
Wafer scale integration
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Beschreibung
Zusammenfassung:A novel, media-isolated, temperature-compensated, bulk-micromachined integrated absolute pressure sensor has successfully been developed. The sensor is usable for most applications involving exposure to harsh media, such as fuel vapor seen by manifold absolute pressure (MAP) sensors. Characterization of the device indicates that the devices fabricated meet specifications of a MAP sensor.
DOI:10.1109/SENSOR.1997.635750