Low-order models for fast dynamical simulation of MEMS microstructures

In this paper, are describe how a few simulations of fully meshed dynamical problems can be used to construct efficient low-order models for system-level design of microstructures. We report on the use of this method to capture the measured behaviour of a pressure sensor based on the pull-in time of a beam. Results show that the reduced order model decreases simulation time by at least a factor of 37 while achieving good agreement with experimental data.