Challenges and prospects of A3B5 microvawe foundry

Current results obtained by JSC "Svetlana-Rost", while developing full-cycle foundry service for Russian market, are presented. Standard technologies with crucial dimension of 0.5 micron, examples of microwave devices and acoustic resonators realization are presented.

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Bibliographische Detailangaben
Hauptverfasser: Krasovitsky, D. M., Dudin, A. L., Katsavets, N. I., Kokin, S. V., Filaretov, A. G., Chaly, V. P., Viuginov, V. N.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Current results obtained by JSC "Svetlana-Rost", while developing full-cycle foundry service for Russian market, are presented. Standard technologies with crucial dimension of 0.5 micron, examples of microwave devices and acoustic resonators realization are presented.