Micromachining with femtosecond laser written radial polarization converter
Structures for microfluidics are fabricated with radially polarized femtosecond laser beam. Radial polarization is produced using birefringent optical element. Omnidirectional etching can be achieved using cylindrically symmetric polarization.
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| creator | Beresna, M. Gecevicius, M. Kazansky, P. G. Champion, A. Bellouard, Y. |
| description | Structures for microfluidics are fabricated with radially polarized femtosecond laser beam. Radial polarization is produced using birefringent optical element. Omnidirectional etching can be achieved using cylindrically symmetric polarization. |
| doi_str_mv | 10.1364/CLEO_SI.2012.CM4K.7 |
| format | Conference Proceeding |
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| ispartof | 2012 Conference on Lasers and Electro-Optics (CLEO), 2012, p.1-2 |
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| language | eng |
| recordid | cdi_ieee_primary_6325799 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Etching Fabrication Laser beams Lasers Silicon compounds Ultrafast optics Writing |
| title | Micromachining with femtosecond laser written radial polarization converter |
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