Micromachining with femtosecond laser written radial polarization converter

Micromachining with femtosecond laser written radial polarization converter

Structures for microfluidics are fabricated with radially polarized femtosecond laser beam. Radial polarization is produced using birefringent optical element. Omnidirectional etching can be achieved using cylindrically symmetric polarization.

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Bibliographische Detailangaben
Hauptverfasser: Beresna, M., Gecevicius, M., Kazansky, P. G., Champion, A., Bellouard, Y.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Etching
Fabrication
Laser beams
Lasers
Silicon compounds
Ultrafast optics
Writing
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Beschreibung
Zusammenfassung:Structures for microfluidics are fabricated with radially polarized femtosecond laser beam. Radial polarization is produced using birefringent optical element. Omnidirectional etching can be achieved using cylindrically symmetric polarization.
ISSN:2160-8989
2160-9004
DOI:10.1364/CLEO_SI.2012.CM4K.7