A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms

A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms

A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications.

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Bibliographische Detailangaben
Hauptverfasser: Kah How Koh, Chengkuo Lee
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Actuators
CMOS integrated circuits
Coils
Electromagnetics
Hybrid Actuation
Micromechanical devices
Micromirrors
Mirror
Optical Microelectromechanical Systems
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Beschreibung
Zusammenfassung:A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications.
ISSN:2160-5033
DOI:10.1109/OMEMS.2012.6318890