PZT micromirror with integrated piezoresistive position sensors

PZT micromirror with integrated piezoresistive position sensors

PZT is an ideal material for high force micromechanical actuators. However, the inherent hysteresis prevents accurate positioning. By integrating piezoresistive sensors it has been shown that the actuation of a piston-type micromirror can be improved.

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Bibliographische Detailangaben
Hauptverfasser: Bakke, T., Johansen, I.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Actuators
Hysteresis
MEMS
micromirror
Micromirrors
mirror
piezoelectric
Piezoresistance
PZT
Resistors
Sensors
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Beschreibung
Zusammenfassung:PZT is an ideal material for high force micromechanical actuators. However, the inherent hysteresis prevents accurate positioning. By integrating piezoresistive sensors it has been shown that the actuation of a piston-type micromirror can be improved.
ISSN:2160-5033
DOI:10.1109/OMEMS.2012.6318868