Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application

Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application

A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to provide omnidirectional scanning in an automotive time-of-flight LIDAR sensor application. Wafer level vacuum packaging technology is applied to enable circular scanning at 550Hz at large tilt angle.

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Bibliographische Detailangaben
Hauptverfasser: Hofmann, U., Senger, F., Soerensen, F., Stenchly, V., Jensen, B., Janes, J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Automotive engineering
comb drive
Laser beams
Lenses
LIDAR
Measurement by laser beam
MEMS mirror
Micromechanical devices
Mirrors
omnidirectional scanning
Time measurement
wafer level vacuum packaging
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Beschreibung
Zusammenfassung:A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to provide omnidirectional scanning in an automotive time-of-flight LIDAR sensor application. Wafer level vacuum packaging technology is applied to enable circular scanning at 550Hz at large tilt angle.
ISSN:2160-5033
DOI:10.1109/OMEMS.2012.6318847