Marathon and IRONMAN/sup TM/ testing of the Trikon Technologies Sigma ForceFill/sup TM

This paper focuses on the testing and improvement of the Trikon Technologies Sigma ForceFill/sup TM/ tool installed in a pilot line at the TI Dallas Productization Fab, DPI. A series of five tests were run on the system to determine its viability as a volume production tool.

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Bibliographische Detailangaben
Hauptverfasser:	Strupp, J., Gonzalez, D., McKeon, D., Saran, M., Mena, R., Zuhoski, S., Niemyski, P., Holverson, P., Carrington, N., Butler, D., Dobson, C.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Aluminum Atherosclerosis Instruments Production Reliability Sputter etching Stability Stress System testing Vacuum systems
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Beschreibung
Zusammenfassung:	This paper focuses on the testing and improvement of the Trikon Technologies Sigma ForceFill/sup TM/ tool installed in a pilot line at the TI Dallas Productization Fab, DPI. A series of five tests were run on the system to determine its viability as a volume production tool.
ISSN:	1078-8743 2376-6697
DOI:	10.1109/ASMC.1997.630716