Silicon-organic hybrid fabrication platform for integrated circuits
The combination of CMOS compatible Silicon-On-Insulator (SOI) fabrication technology with organic cover materials constitutes the Silicon-Organic Hybrid (SOH) fabrication platform, which shows innovative functionality for the making of integrated optical circuits. We report on experimental demonstra...
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| creator | Korn, D. Alloatti, L. Lauermann, M. Pfeifle, J. Palmer, R. Schindler, P. C. Freude, W. Koos, C. Leuthold, J. Hui Yu Bogaerts, W. Komorowska, K. Baets, R. Van Campenhout, J. Verheyen, P. Wouters, J. Moelants, M. Absil, P. Secchi, A. Dispenza, M. Jazbinsek, M. Gunter, P. Wehrli, S. Bossard, M. Zakynthinos, P. Tomkos, I. |
| description | The combination of CMOS compatible Silicon-On-Insulator (SOI) fabrication technology with organic cover materials constitutes the Silicon-Organic Hybrid (SOH) fabrication platform, which shows innovative functionality for the making of integrated optical circuits. We report on experimental demonstrations of essential building blocks for transceivers, while relying only on well-known SOI processing steps and simple post processing of the organic materials. |
| doi_str_mv | 10.1109/ICTON.2012.6254470 |
| format | Conference Proceeding |
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C.</au><au>Freude, W.</au><au>Koos, C.</au><au>Leuthold, J.</au><au>Hui Yu</au><au>Bogaerts, W.</au><au>Komorowska, K.</au><au>Baets, R.</au><au>Van Campenhout, J.</au><au>Verheyen, P.</au><au>Wouters, J.</au><au>Moelants, M.</au><au>Absil, P.</au><au>Secchi, A.</au><au>Dispenza, M.</au><au>Jazbinsek, M.</au><au>Gunter, P.</au><au>Wehrli, S.</au><au>Bossard, M.</au><au>Zakynthinos, P.</au><au>Tomkos, I.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Silicon-organic hybrid fabrication platform for integrated circuits</atitle><btitle>2012 14th International Conference on Transparent Optical Networks (ICTON)</btitle><stitle>ICTON</stitle><date>2012-01-01</date><risdate>2012</risdate><spage>1</spage><epage>4</epage><pages>1-4</pages><issn>2162-7339</issn><isbn>9781467322287</isbn><isbn>1467322288</isbn><eisbn>9781467322294</eisbn><eisbn>1467322296</eisbn><eisbn>9781467322270</eisbn><eisbn>146732227X</eisbn><abstract>The combination of CMOS compatible Silicon-On-Insulator (SOI) fabrication technology with organic cover materials constitutes the Silicon-Organic Hybrid (SOH) fabrication platform, which shows innovative functionality for the making of integrated optical circuits. 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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | electro-optic devices Electrooptical waveguides Modulation modulators Optical device fabrication photonic integrated circuits Silicon silicon-on-insulator silicon-organic hybrid |
| title | Silicon-organic hybrid fabrication platform for integrated circuits |
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