Silicon-organic hybrid fabrication platform for integrated circuits

The combination of CMOS compatible Silicon-On-Insulator (SOI) fabrication technology with organic cover materials constitutes the Silicon-Organic Hybrid (SOH) fabrication platform, which shows innovative functionality for the making of integrated optical circuits. We report on experimental demonstra...

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Hauptverfasser:	Korn, D., Alloatti, L., Lauermann, M., Pfeifle, J., Palmer, R., Schindler, P. C., Freude, W., Koos, C., Leuthold, J., Hui Yu, Bogaerts, W., Komorowska, K., Baets, R., Van Campenhout, J., Verheyen, P., Wouters, J., Moelants, M., Absil, P., Secchi, A., Dispenza, M., Jazbinsek, M., Gunter, P., Wehrli, S., Bossard, M., Zakynthinos, P., Tomkos, I.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	electro-optic devices Electrooptical waveguides Modulation modulators Optical device fabrication photonic integrated circuits Silicon silicon-on-insulator silicon-organic hybrid
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Beschreibung
Zusammenfassung:	The combination of CMOS compatible Silicon-On-Insulator (SOI) fabrication technology with organic cover materials constitutes the Silicon-Organic Hybrid (SOH) fabrication platform, which shows innovative functionality for the making of integrated optical circuits. We report on experimental demonstrations of essential building blocks for transceivers, while relying only on well-known SOI processing steps and simple post processing of the organic materials.
ISSN:	2162-7339
DOI:	10.1109/ICTON.2012.6254470