Feasibility study on in situ CCVD grown CNTs for field-effect power device applications

Feasibility study on in situ CCVD grown CNTs for field-effect power device applications

In this paper we investigate the feasibility of carbon nanotubes (CNTs) for power applications. On the basis of a process which fabricates thousands of carbon nanotube field-effect transistors (CNTFETs) by means of catalytic chemical vapor deposition (CCVD) we will show that CNTFETs are capable to p...

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Bibliographische Detailangaben
Hauptverfasser: Keyn, M., Wessely, P. J., Wessely, F., Rispal, L., Palm, J., Schwalke, U.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Annealing
carbon nanotube field-effect transistor
Carbon nanotubes
catalytic chemical vapor deposition
CNTFETs
Fabrication
Hydrogen
LED
Palladium
power application
Substrates
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Zusammenfassung:In this paper we investigate the feasibility of carbon nanotubes (CNTs) for power applications. On the basis of a process which fabricates thousands of carbon nanotube field-effect transistors (CNTFETs) by means of catalytic chemical vapor deposition (CCVD) we will show that CNTFETs are capable to provide a sufficiently high current to drive a light-emitting diode (LED).
DOI:10.1109/DTIS.2012.6232952