Introduction to the Special Section on Microelectromechanical Systems in Industrial Environments

Introduction to the Special Section on Microelectromechanical Systems in Industrial Environments

The 11 papers in this special section provide a comprehensive review of the industrial applications of microelectromechanical systems (MEMS).

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on industrial electronics (1982) 2012-12, Vol.59 (12), p.4853-4854
Hauptverfasser: Luque, Antonio, Mrad, Ridha Ben
Format: Artikel
Sprache:eng
Schlagworte:
Microelectromechanical devices
Microelectromechanical systems
Special issues and sections
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Beschreibung
Zusammenfassung:The 11 papers in this special section provide a comprehensive review of the industrial applications of microelectromechanical systems (MEMS).
ISSN:0278-0046
1557-9948
DOI:10.1109/TIE.2012.2197312