A MEMS sensor for low-frequency vibration energy harvesting

A MEMS sensor for low-frequency vibration energy harvesting

This paper reports ongoing work in development of a MEMS electrostatic sensor for self-powered detection of mechanical vibrations of less than 1000 Hz. The sensor is an in-plane overlapping comb configuration. Six different variants on a common design were fabricated on a single die using the commer...

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Bibliographische Detailangaben
Hauptverfasser: Moses, M. S., Wester, B. A., Brown, C. Y., Kutzer, M. D., Kucher, P. R., Rebello, K. J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitance
electrostatic devices
Electrostatics
Energy harvesting
Fingers
Micromechanical devices
Resonant frequency
vibration measurement
Vibrations
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Beschreibung
Zusammenfassung:This paper reports ongoing work in development of a MEMS electrostatic sensor for self-powered detection of mechanical vibrations of less than 1000 Hz. The sensor is an in-plane overlapping comb configuration. Six different variants on a common design were fabricated on a single die using the commercial SOI-MUMPS process. Additional masses were manually added to lower the resonant frequency.
DOI:10.1109/MAMNA.2012.6195098