32nm yield learning using addressable defect arrays
The Shorts and Opens Monitor (SOM) is a read-only addressable defect array that is widely and effectively used as a yield monitor in technology development and early stage of manufacturing. The SOM consists of scan-chain input/output, fully stackable DUTs, reference resistors for calibration, and a...
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| creator | Karthikeyan, M. Cassels, J. Arie, L. |
| description | The Shorts and Opens Monitor (SOM) is a read-only addressable defect array that is widely and effectively used as a yield monitor in technology development and early stage of manufacturing. The SOM consists of scan-chain input/output, fully stackable DUTs, reference resistors for calibration, and a robust periphery design. The area efficiency and defect localization capabilities of the SOM greatly enable characterization of top yield detractors in 32nm process technology. |
| doi_str_mv | 10.1109/ICMTS.2012.6190620 |
| format | Conference Proceeding |
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The SOM consists of scan-chain input/output, fully stackable DUTs, reference resistors for calibration, and a robust periphery design. The area efficiency and defect localization capabilities of the SOM greatly enable characterization of top yield detractors in 32nm process technology.</abstract><pub>IEEE</pub><doi>10.1109/ICMTS.2012.6190620</doi><tpages>7</tpages></addata></record> |
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| identifier | ISSN: 1071-9032 |
| ispartof | 2012 IEEE International Conference on Microelectronic Test Structures, 2012, p.122-128 |
| issn | 1071-9032 2158-1029 |
| language | eng |
| recordid | cdi_ieee_primary_6190620 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Arrays Clocks Force Latches Testing |
| title | 32nm yield learning using addressable defect arrays |
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