32nm yield learning using addressable defect arrays

32nm yield learning using addressable defect arrays

The Shorts and Opens Monitor (SOM) is a read-only addressable defect array that is widely and effectively used as a yield monitor in technology development and early stage of manufacturing. The SOM consists of scan-chain input/output, fully stackable DUTs, reference resistors for calibration, and a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Karthikeyan, M., Cassels, J., Arie, L.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Arrays
Clocks
Force
Latches
Testing
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Beschreibung
Zusammenfassung:The Shorts and Opens Monitor (SOM) is a read-only addressable defect array that is widely and effectively used as a yield monitor in technology development and early stage of manufacturing. The SOM consists of scan-chain input/output, fully stackable DUTs, reference resistors for calibration, and a robust periphery design. The area efficiency and defect localization capabilities of the SOM greatly enable characterization of top yield detractors in 32nm process technology.
ISSN:1071-9032
2158-1029
DOI:10.1109/ICMTS.2012.6190620