Development of novel Al doped zinc oxide film and its application to solar cells

Development of novel Al doped zinc oxide film and its application to solar cells

We have developed novel Al doped zinc oxide (AZO) films, AZO-X films, using d.c. magnetron sputtering process and have investigated their electro-optical properties and their surface morphology. AZO-X films showed a good balance between the transmittance in near-infrared area and the durability unde...

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Hauptverfasser: Kuramochi, H., Akiike, R., Iigusa, H., Utsumi, K., Shibutami, T., Sichanugrist, P., Konagai, M.
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Sprache:eng
Schlagworte:
Electrodes
Etching
Photovoltaic cells
Silicon
Surface morphology
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creator Kuramochi, H.
Akiike, R.
Iigusa, H.
Utsumi, K.
Shibutami, T.
Sichanugrist, P.
Konagai, M.
description We have developed novel Al doped zinc oxide (AZO) films, AZO-X films, using d.c. magnetron sputtering process and have investigated their electro-optical properties and their surface morphology. AZO-X films showed a good balance between the transmittance in near-infrared area and the durability under 85°C-85%RH condition. And AZO-X film also had higher haze value after wet chemical etching than the value obtained in normal AZO film. Furthermore, AZO-X films have been applied to amorphous Si (a-Si) single-type solar cells as the front electrodes. The efficiency as high as 10.1% with high short-circuit current has been obtained, showing that this novel AZO-X is the new promising material for front electrode of a-Si solar cells.
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subjects Electrodes
Etching
Photovoltaic cells
Silicon
Surface morphology
title Development of novel Al doped zinc oxide film and its application to solar cells
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