1.12GHz Opto-Acoustic Oscillator

1.12GHz Opto-Acoustic Oscillator

We report on the development of a GHz Opto-Acoustic Oscillator (OAO) using an air gap capacitively actuated silicon optomechanical resonator. An optical sensing technique using optomechanical ring resonators in silicon allows for observation of the mechanical resonances of electrostatically excited...

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Bibliographische Detailangaben
Hauptverfasser: Sridaran, S., Bhave, S. A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Optical imaging
Optical modulation
Optical ring resonators
Optical sensors
Oscillators
Resonant frequency
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Beschreibung
Zusammenfassung:We report on the development of a GHz Opto-Acoustic Oscillator (OAO) using an air gap capacitively actuated silicon optomechanical resonator. An optical sensing technique using optomechanical ring resonators in silicon allows for observation of the mechanical resonances of electrostatically excited resonators up to 3.5GHz. Using amplifiers to compensate for losses, we demonstrate an oscillator operating at 1.12GHz with 8.8dBm output RF power and a phase noise of -85 dBc/Hz at 10 kHz offset.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2012.6170274