Thermal conductivity manipulation in single crystal silicon via lithographycally defined phononic crystals

The thermal conductivity of single crystal silicon was engineered to be as low as 32.6W/mK using lithographically defined phononic crystals (PnCs), which is only one quarter of bulk silicon thermal conductivity [1]. Specifically sub-micron through-holes were periodically patterned in 500nm-thick sil...

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Bibliographische Detailangaben

Hauptverfasser:	Bongsang Kim, Nguyen, J., Clews, P. J., Reinke, C. M., Goettler, D., Leseman, Z. C., El-Kady, I., Olsson, R. H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Conductivity Crystals Finite element methods Lattices Phonons Temperature measurement Thermal conductivity
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