32kHz MEMS-based oscillator for implantable medical devices

A MEMS based high stability 32kHz oscillator for real time clock (RTC) for medical device application using 0.13μm CMOS technology is designed and simulated. This oscillator achieves a power consumption of less than 1μA with 10pF load capacitor, and a functional temperature drift of ± 80ppm with tem...

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Bibliographische Detailangaben
Hauptverfasser:	Jae-Hong Chang, ShengXi Diao, Kumarasamy, R. M., Minkyu Je
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	32kHz CMOS Cystal oscillator Electrodes Low power MEMS Micromechanical devices Oscillator Oscillators Resonant frequency RTC Silicon Temperature compensation Temperature distribution Tuning
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Beschreibung
Zusammenfassung:	A MEMS based high stability 32kHz oscillator for real time clock (RTC) for medical device application using 0.13μm CMOS technology is designed and simulated. This oscillator achieves a power consumption of less than 1μA with 10pF load capacitor, and a functional temperature drift of ± 80ppm with temperature range from -20°C to 60°C.
ISSN:	2325-0631
DOI:	10.1109/ISICir.2011.6131942