pH sensing from frequency response of SGFET

pH sensing from frequency response of SGFET

This paper presents suspended gate field effect transistors (SGFET) used as highly sensitive pH sensors. The devices are there characterized in dynamic mode. The gain, measured versus frequency, is studied for different pH values and shows a resonance frequency depending on the pH value. These resul...

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Bibliographische Detailangaben
Hauptverfasser: Kherrat, A., Le Bihan, F., Jacques, E., Thomas, M., De Sagazan, O., Crand, S., Mohammed-Brahim, T., Razan, F.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
FETs
Logic gates
Resonant frequency
Sensitivity
Sensor phenomena and characterization
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Beschreibung
Zusammenfassung:This paper presents suspended gate field effect transistors (SGFET) used as highly sensitive pH sensors. The devices are there characterized in dynamic mode. The gain, measured versus frequency, is studied for different pH values and shows a resonance frequency depending on the pH value. These results, obtained with different geometries of SGFET, give an opportunity to develop new microsystems, CMOS compatible, highly sensitive to pH.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2011.6127353