Resolution and start-up dynamics of MEMS resonant accelerometers
In this paper it is presented a study on two key parameters of MEMS resonant accelerometers, resolution and start-up dynamics. A uniaxial differential accelerometer, built in the surface micromachining ThELMA process of ST Microelectronics, is used in the tests together with a discrete components re...
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| creator | Tocchio, A. Caspani, A. Langfelder, G. Longoni, A. Lasalandra, E. |
| description | In this paper it is presented a study on two key parameters of MEMS resonant accelerometers, resolution and start-up dynamics. A uniaxial differential accelerometer, built in the surface micromachining ThELMA process of ST Microelectronics, is used in the tests together with a discrete components readout circuit. The implemented circuit is an oscillator constituted by a Transimpedance stage (TIA) followed by a gain stage and an amplitude-limiting circuit (ALC). In the present work, it is shown how the sensor resolution can be related to the phase noise of the oscillator output signal and how the start-up dynamics depends on the biasing voltage of the resonator. A sensing resolution of 98μg/√Hz is demonstrated through experimental measurements and a well-defined relationship between the resonators biasing voltage and the start-up time is observed. |
| doi_str_mv | 10.1109/ICSENS.2011.6127302 |
| format | Conference Proceeding |
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| ispartof | 2011 IEEE SENSORS Proceedings, 2011, p.161-164 |
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| language | eng |
| recordid | cdi_ieee_primary_6127302 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Acceleration Accelerometers Frequency measurement Phase noise Resonant frequency |
| title | Resolution and start-up dynamics of MEMS resonant accelerometers |
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