Resolution and start-up dynamics of MEMS resonant accelerometers
In this paper it is presented a study on two key parameters of MEMS resonant accelerometers, resolution and start-up dynamics. A uniaxial differential accelerometer, built in the surface micromachining ThELMA process of ST Microelectronics, is used in the tests together with a discrete components re...
Gespeichert in:
Hauptverfasser: | , , , , |
---|---|
Format: | Tagungsbericht |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | In this paper it is presented a study on two key parameters of MEMS resonant accelerometers, resolution and start-up dynamics. A uniaxial differential accelerometer, built in the surface micromachining ThELMA process of ST Microelectronics, is used in the tests together with a discrete components readout circuit. The implemented circuit is an oscillator constituted by a Transimpedance stage (TIA) followed by a gain stage and an amplitude-limiting circuit (ALC). In the present work, it is shown how the sensor resolution can be related to the phase noise of the oscillator output signal and how the start-up dynamics depends on the biasing voltage of the resonator. A sensing resolution of 98μg/√Hz is demonstrated through experimental measurements and a well-defined relationship between the resonators biasing voltage and the start-up time is observed. |
---|---|
ISSN: | 1930-0395 2168-9229 |
DOI: | 10.1109/ICSENS.2011.6127302 |