Modeling and design of a planar 3-axis MEMS rate gyro

This paper deals with the design and fabrication of a 3-axis Coriolis Vibrating micro Gyro (μCVG), based on a single planar monolithic structure. The presented μCVG design ensures a high mechanical coupling between one single driving mode and each one of the 3 sensing modes when the structure is subjected to Coriolis acceleration, with limited mechanical cross-coupling between vibration modes. The structure is made of a semi-conducting material with a cubic lattice, such as Silicon (Si) or Gallium Arsenide (GaAs). GaAs was particularly investigated for its piezoelectric properties, allowing both the actuation and the detection of the mechanical vibrations.