Microcantilever array sensors with integrated PDMS microfluidics

Microcantilever array sensors with integrated PDMS microfluidics

We recently developed a new in-plane photonic transduction method for simultaneous readout of microcantilevers in an array on a single chip. Here we describe scale-up of array size to 64 microcantilevers (MCLs) and integration of polydimethylsiloxane (PDMS) microfluidics with chips including multipl...

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Bibliographische Detailangaben
Hauptverfasser: Nordin, G. P., Anderson, R. R., Weisheng Hu, Ness, S. J., Richards, D. C., Oxborrow, J., Gustafson, T., Tsai, B., Mazzeo, B., Woolley, A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Arrays
Microfluidics
Photonics
Pumps
Sensors
Silicon
Temperature measurement
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Beschreibung
Zusammenfassung:We recently developed a new in-plane photonic transduction method for simultaneous readout of microcantilevers in an array on a single chip. Here we describe scale-up of array size to 64 microcantilevers (MCLs) and integration of polydimethylsiloxane (PDMS) microfluidics with chips including multiple MCL arrays. We illustrate biosensing with biotin/streptavidin as a model system, and demonstrate an integrated on-chip pump with a MCL array.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2011.6127019