Nd-doped Bismuth Titanate based ferroelectric field effect transistor: Design, fabrication, and optimization

Ferroelectric field effect transistor (FeFET) is a promising candidate in nonvolatile memory application due to its fast read/write speed, nondestructive readout, and low power consumption. Since the poor retention characteristic can be improved by introducing insulator buffer layers between gate layer and FET channel region, more and more attentions are devoted to the realization and optimization of this novel memory device [1]. Traditional ferroelectric materials, such as PZT [2, 3] and SBT [4] based FeFETs are extensively studied and reported in the past decades. Recently, Nd-doped Bismuth Titanate B 3.15 Nd 0.85 Ti 3 O 12 (BNdT) with a large remnant polarization (2Pr=103µC/cm 2 ) and outstanding fatigue endurance was reported by Chon et al. [5], and many ferroelectric applications are being processed based on this brand new ferroelectric material [6, 7]. In this letter, we fabricated a BNdT based FeFET for the first time. The fundamental structural and electrical properties are investigated correspondingly.